Title Goes Here
By Nancy Jackson,2014-08-09 18:13
Implant Angle Control on Optima MD
R. D. Rathmell, B. Vanderberg, A. M. Ray, D. E. Kamenitsa, M. Harris, and K.
Axcelis Technologies Inc, 108 Cherry Hill Drive, Beverly, MA 01915
Abstract. Implant angle control is increasingly important with each new device node. Some devices have demonstrated
a sensitivity of threshold voltage of about 100 mV/deg for implant..