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[doc] Potential Energy Threshold for Erosion Appearance by Impact of Sow Highly Charged Ions on a GaN Surface

By Derrick Wells,2014-09-08 02:23
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[doc] Potential Energy Threshold for Erosion Appearance by Impact of Sow Highly Charged Ions on a GaN Surface

    Potential Energy Threshold for Erosion

    Appearance by Impact of Sow Highly

    Charged Ions on a GaN Surface

2008IMP&HIRFLAnnualReport

    ;3__4PotentialEnergyThresholdforErosionAppearance

    ;byImpactofSowHighlyChargedIonsonaGaNSurface

    ;ZhangLiqing,ZhangChonghong,YangYitao,LiBingsheng,ZhouLihongandSunYoumei

    ;WeinvestigatetheerosionappearanceonthesurfaceofGaNcrystalsbyimpactofvariousslowhighly

    ;chargedions(Ar,XeandPb..).Atomicforcemicroscopyrevealsasurprisinglysharpandwellde

    ;finedthresholdofpotentialenergycarriedintothecollisionofabout4.0keVforerosionappearance.And

    ;theetcheddepthisalinearfunctionofpotentialenergydeposited,increasingwiththepotentialenergy

    ;Potentialenergy(keV)

    ;Fig.1Meanheightofformednanostepsasa

    ;functionofthepotentialenergyofAr.Xe

    ;andPbqions,forionsnorma1incidence.Minus

    ;valuesdenoteerosion,whileplusvaluesdenote ;bulge.

    ;increase.Moreover,theetchrateisalmostfourtimesfor ;60.offincidencethanthatofnormalincidence.Andthe ;etchratebyXeqislargerthanthatbypbq+.

    ;Fig.1showsrelationshipbetweenthemeanheightof ;stepandpotentialenergy,correspondlngtothechargestate ;forArq,Xeq..andpbqnormalincidence.Wecansee ;fromFig.1,thesurfaceofGaNsamplewasetchedwhen ;potentialenergycarriedintothecollisionexceedsathresh

    ;oldvalue,about4.0keV,regardlessofion.

    ;Fig.2showsrelationshipbetweenthemeanheightof ;stepandpotentialenergy,correspOndlngtothechargestate ;forXeqandpbq60.offnormalincidence.Thesamecon

    ;clusionwasdrawnfromFig.2,thatthesurfaceofGaN ;samplewasetchedwhenpotentialenergycarriedintothe ;collisionexceedsathresholdvalue,about4.0keV,regard

    ;lessofionandincidentangle.

    ;Potentialenergy(keV)

    ;Fig.2Meanheightofformednanostepsasafunc

    ;tionofthepotentialenergyofXeandPbions. ;forions60.offnormalincidence.Minusvaluesde

;noteerosion,whileplusvaluesdenotebulge.

    ;Potentialenergy(keV)

    ;Fig.3Meanetcheddepthasalinearfunctionofthe

    ;potentialenergyofXeq(quadrangle)andPbq(tri

    ;angle)ions.Nmeansnormalincidence,whileT

    ;means60.offnormalincidence.

    ;Fig.3showstherelationshipbetweenthemeanerosiondepthandpotentia1energyintwogeometries

    ;bvXeq_.andpbq.”a”and”c”donatethefunctionsoferosiondepthandpotenti

    alenergyforXeqand

    ;Pb.normalincidencerespectively;”b”and”d”donatethefunctionsoferosiondepthandpotentialenergy

    ;forXeqandpbq60.offnormalincidencerespectively.Thefunctionfor”a”.”b”.”c’’and”d’’isD

    ;1.46E5.69,D5.87E22.82,D1.24E5.22,D4.94E

    20.75respectively.Wecansee

    ;fromFig.3,thattheetcheddepthisa1inearfunctionofpotentialenergydeposited.increasingwiththepo

    ;tentialenergyinerease.Moreover,theetchrateisalmostfourtimesfor60.offineidencethanthatofnor

    ;malincidence.AndtheetchratebyXeqislargerthanthatbypbq+. ;_II1),_IIIQ0?

;(__HH口一QI{cI?Qu_

;_II)=lQQ0=l?

;

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