MPECVD-R2.0 SYSTEM
# 601 Dongyoung-Venturestel,
172 Ojeon-dong, Uiwang-si, Guynggi-do 437-820, Korea TEL) 82-31-457-5615 FAX) 82-31-457-5629 http://www.woosinent.co.kr
Woosin CryoVac MPECVD-R2.0
Microwave Plasma-enhanced
Chemical Vapor Deposition system
Research 2.0
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SYSTEM Requirement Check Sheet
1. Installation space 2000W X 2200D X 2100H 2. Main power 3Phase 220V 60Hz –30A
2Pressure 3kg/cm 3. Cooling
water In/out fitting 12 mm tube 4.Compressed 2Pressure 5 kg/cm (Pneumatic operation) air
Tube 1/4″sus tube(SUS316L) 5. Gas line Input fitting 1/4″swagelock
Gas output Regulator 2stage 1/4″swagelock fitting
N2
O2
CH4 6. Operating Gases
Etc (Ar, H2, C2H2)
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CONTENTS
1 General Information
1.1 Introduction
1.2 Safety Information
1.3 System Configurations / Specifications
1.3.1 System schematic 系统原理
1.3.2 System Requirements系统要求
1.3.2.1 Electrical Requirements电气要求
1.3.2.2 Working Gas
1.3.2.3 Cooling Water
1.3.3 Microwave Generator
1.3.3.1 Power Supply
1.3.3.2 3 stub tuner 3个微波协调器
1.3.3.3 Isolator and Circulator隔离器和循环器
1.3.3.4 Microwave Generator Head 1.3.4 DC Power Supply直流电源供应
1.3.5 Vacuum Pumping
1.3.6 Vacuum Gauge Sensor 1.3.7 Chamber
1.3.8 Heater Stage
1.3.9 Gas Control Unit
2 Installation and System Set-up安装和系统设置
2.1 Unpacking
2.2 Magnetron head, Tuner and Source Connection磁控头 调谐器
源接头
2.3 Main Power Line
2.4 Pneumatic Line气动管路
2.5 Cooling Line
2.6 Heating Stage
2.7 Pump Line
2.8 How to adjust Water & Air Sensor
3 Short Course Instruction of System Operation
3.1 Power Controller Function and Display电源控制器及显示功能
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3.1.1 System Controller
3.1.1.1 Overview
3.1.1.2 Touch Panel
3.1.2 Heater Controller
3.1.2.1 Overview
3.1.2.2 Front Panel
3.1.2.3 Rear panel
3.2 System Operation
3.2.1 Overview
3.2.2 Preparation
3.2.3 Microwave CVD Start
3.2.4 DC Power Supply
3.2.5 System Shutdown
4 Schematics of Vacuum System 真空系统的原理图
5 Schematics of Electric Circuit
6 Trouble Shooting and Maintenance常见故障排除及维护
6.1 Vacuum Leak
6.2 Microwave Leak
6.3 Replacement of Microwave source quartz tube
6.4 Replacement of Heater source
7 Appendix
7.1 Spare parts备用配件
7.2 Service Procedure
7.3 Limited Warranty保修
8 Details of main Components (Reference Manual)
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1. General Information
1.1 Introduction
Chemical Vapor Deposition or CVD is a broad class of processes using controlled chemical reactions to create layers on substrates. CVD involves the formation of a solid film on a heated substrate surface by means of a chemical reaction in a gas or in the vapor phase. This process employs various gaseous, liquid and solid chemicals as sources of the elements of which the thin film is to be made. In comparison with most thin film preparation methods, CVD has a number of unique advantages such as the versatility用途广泛, adaptability适应性, compatibility兼容性, quality, simplicity, re-
productivity, productivity, and cheapness. For these reasons, CVD has expanded continuously and developed into the most important method for producing films for solid-state devices. CVDs are classified by AP (Atmosphere Pressure) CVD, LP (low pressure)
CVD, PE(plasma enhanced) CVD, MO (Metal Organic有机金属) CVD.
MPECVD-RA which using PECVD technique takes advantage of the high energy electrons present in glow discharges to dissociate and ionize gaseous molecules, thus generating chemically active radicals and ions. Hence, PECVD can be performed under relatively low temperature. To make or maintain a chemical reaction and using Microwave or RF-enhanced glow discharge, PECVD forms a film by conveying energy to reacting gas. Compared with the APCVD or LPCVD production process, this process lets you operate at low temperatures and also has the advantage that the depositional speed is fast.
Application 应用
- Surface activation
- Carbon Nanotube
- Diamond Growing
- Decomposition or synthesis of gases 分解与合成气体
- Deposition of layers
- Plasma polymerization等离子聚合
- Plasma cleaning of surface
- Plasma etching, etc
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1.2 Safety Information
1.2.1 Overview
Important:
? Please read this manual and safety information in all related manuals before
installing or using the instrument.
? The safety notes and regulations given in this and related documentation have to
be observed at all time.
? Check for correct main voltage before connecting any equipment.
Warning: Lethal Voltages!
? Adjustments and fault finding operation may only be carried out by authorized
personnel qualified to handle lethal voltages.
? Lethal voltage may be present at parts of microwave generator/component itself
during operation.
Always
? All the connectors which were originally supplied with fixing screws must always be used with their fixing screws attached and tightly secured.
? Leave it for a few minute after switching off for any stored energy to discharge.
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Interlock
? Cooling water: The water pressure switch is interlocked to avoid break-down of the
vacuum chamber and Magnetron. If the water pressure is low or stop, buzzer is
operated, and then the microwave generator power is down.
? Ultimate vacuum pressure: The microwave generator was not operated when the
pressure is lower than setting ultimate pressure
? Vent valve: The vent valve is not opened when the V6(main gas inlet valve) valve is
open
1.2.2 Microwave Radiation
No ionizing radiation is electromagnetic radiation that does not disrupt the
chemical bonds in biological molecules. The electromagnetic frequencies
that produce photon energy of less than 0.1 electron volts, and hence are
called no ionizing, are those frequencies below roughly 2.45Ghz. For
reference this is just above the ultraviolet frequencies.
1.2.3 High Voltage
- Danger: High Voltage 5kV in inside the microwave Generator, Power Head
and the HV cable
- Danger: High Voltage 2.0kV in DC power supply.
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1.3 System Configurations / Specifications
1.3.1 System schematic
< Front View > < Side View >
N o Controller Name
1 Microwave Power Generator Alter TM020
2 DC Power Supply
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1.3.2 System Requirements
1.3.2.1 Electrical requirements
Specifications
Voltage 220VAC
Frequency 60/50Hz
Phase 3Phase
Current 30Amperes 1.3.2.2 Working gas
Channel Ch1 Ch2 Ch3 Ch4,Ch5
O CH4 SPARE Gas H22
SCCM
standard-state Units SCCM SCCM SCCM cubic
centimeter per
minute, Range 500 10 50
※ Gas inlet port: 1/4″ Swagelock fitting or VCR
1.3.2.3 Cooling Water
2- 3kg/cm – Microwave CVD operation
- Water in/out port: 12mm one touch fitting
1.3.3 Microwave Generator
1.3.3.1 Power Supply
Specifications
Input Power 208VAC 1phase
Out power 2.0kW
Frequency 2.54GHz
Current 30Amperes
Size 19" X 7"
Weight 46 lb磅
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