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Methodandapparatusforgeneratinghighlydenseuniformplasmainahighfrequencyelectricfield

By Jesus Knight,2014-06-29 23:38
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1 Method and apparatus for generating highly dense uniform plasma in a high frequency electric field Abstract A plasma generating method comprises: a first step of disposing a plurality of lateral electrodes at lateral sides of a plasma generating part in a vacuum chamber; a second step of respectively applying, to the lateral electrodes, high frequency electric powers of w..
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